Fabrication and characterization of zinc oxide (ZnO) thin films based humidity sensor with fast response by sol-gel method

Present work deals with deposition of Zinc oxide (ZnO) thin films by sol-gel method. Sol was prepared using zinc acetate, 2-Methoxyethanol and monoethanolamine (MEA) as starting materials. Films were grown using spin coating method and annealed at 500◦C. ZnO films morphology was investigated by Scanning Electron Microscope. SEM images reveal that films are composed with wrinkles network. Crystalline structure was studied by means of X-ray diffraction analysis. XRD patterns exhibit three strong peaks (101), (002) and (100) planes assigned to Wurtzite structure. The obtained results for electrical properties were reported. Relative humidity sensing properties has been studied and determined by variation of electrical resistance measurements at various humidity levels. Our experimental results show that the temperature and morphology have strong influence on the response and recovery times of sensing.

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